This paper describes several kinds of new technologies introduced into the latest microlithographic lens system for nikons duv deep ultra violet scanner. The needs of microlithographic lenses are driving advances in lens design software, spherical and aspherical lens manufacturing, glass production and lens metrology. Lens design software programs calculate the system mtf either through the autocorrelation of the exit pupil wavefront function or by fourier transforming the point spread function, which is calculated by fourier transforming the. This first generation microlithographic lens had a track length, or conjugate distance, of about 600mm. Synopsys code v enhances analysis of precision optical.
Creating camera lenses with stereolithography formlabs. Please note this list is tentative and may change at any time. Remaining challenges in microlithographic optical design. The new functions can be utilized to express aberrations of a high na and wide field optical system like a microlithographic projection lens. The main imaging lens of a stepper is the most demanding application of commercial lens design and fabrication today. The new functions are orthogonal to each other and expressed by a simple combination of zernike functions of pupil coordinates and zernike functions of field coordinates.
Delving deep into the mechanics of lens design, optics legend warren j. Buy intermediate optical design spie press monograph vol. Virtually all lens design software today allows graphical depiction and subsequent tolerancing of polychromatic mtf. Typically, the lens designer has to determine the optimum angles of rotation by manually modeling lens element clocking in the commercial optical design software because the nature of errors. Oslo is a powerful optical design program with the scope. Free version of the winlens3d optical design package, which provides serious design and analysis tools for optical engineer, student or designer. Snps, a world leader in software and ip used in the design, verification and manufacture of electronic components and systems, today announced the availability of enhancements to its code v optical design and. In xfdtd, a set of eight 1 to 8 wilkinson stripline power divider networks is designed to act as the connection between the rotman lens and the antenna array. Current developments in lens design and optical engineering.
Orthogonal aberration functions for microlithographic optics. It was a quick, cheap process and had been used to print british army maps during the peninsula war. Design examples of projection lenses for iline exposure lithography and for excimer laser exposure system are presented. Snps news, a world leader in software and ip used in the design, verification and manufacture of electronic components and systems, today announced the availability of enhancements to its code v optical design and analysis software, acquired as part of synopsys acquisition of optical research associates ora. The group is also an independent supplier of optical systems design services. Moreover, the new aberration functions can be used for the microlithographic lens manufacturing process because they can express each aberration component of. The new series can be utilized to express aberration distribution of a high na and wide field optical system like a microlithographic projection lens. Osa automatic clocking optimization for compensating two. Imaging aberrations, defocus, and zernike polynomials definition of a perfect optical system.
The performance evaluation of these designs are also shown. Osa the optical design for microlithographic lenses. Modeling interferometers with lens design software. The resolution of modern microlithographic systems for patterning integrated from ece 4500 at georgia institute of technology.
Just 20 years ago, design software seldom was used for illumination applications. Optical design software helps lens designers predict the behavior of a lens and the constraints the lens will place on a camera. Synopsys optical engineers use global synthesis on every applicable design project. Design optimization optimization capabilities are often the most important consideration when choosing optical design software. We need to be more analytical and use our brains in lens design.
Fundamental considerations for zoom lens design request pdf. Intermediate optical design 2004 kidger publications. The resolution of modern microlithographic systems for. Lens design camber lens series the camber lens series is a new family of lenses calculated with camber technology, which combines complex curves on both surfaces of the lens. Code v is the industryleading optical design software lighttec. The synopsys optical solutions group osg, formerly optical research associates ora, has been providing worldclass support to our code v customers for over 40years. We also assemble a custom 5x microscopy objective that has diffractionlimited performances from. In addition to classical lens design features, it combines advanced ray tracing, analysis, and optimization methods with a highspeed macro language to solve a wide variety of new problems in optical design. High resolution microlithographic reduction lenses are described.
Proceedings volume 5874 current developments in lens design and optical engineering vi. Aberration functions for microlithographic optics springerlink. The design of the rotman lens is performed using remcoms rotman lens designer rld software, which produces a cad version of the device for use in xfdtd. Optical fiber laser products,motion control components. Optical design of the dioptric microlithographic lens was started by modifying a design of projection lens for micro films, which was named ultra micro nikkor. The software s algorithms now are a key and dominant technology in the design of the microlithographic lenses used by many chip makers in their attempts to keep pace with everdecreasing transistor sizes. The device includes an elongation structure, where said elongation structure includes a tapered channel that decreases in width from a first end to a second end. Oct 14, 1986 thus, the microlithographic system typically operates in an air atmosphere which is subject to barometric changes and which fills the space between lens 21 and the reticle holder 11 as well as the space between the lens and the wafer stage. The softwares algorithms now are a key and dominant technology in the design of the microlithographic lenses used by many chip makers in their attempts to keep pace with everdecreasing transistor sizes.
The capabilities that welldesigned aspheric lens surfaces can bring to optical systems are dramatic, from the simplification of objective lenses for cd and dvd drives to larger field sizes for microlithographic projection lenses. This step includes determining the possible variable parameters in the system model that can be modified to improve performance, generating the appropriate merit function and applicationspecific optical design figure 1. Selfcompensation for trefoil aberration of symmetric. Oslo optics software for layout and optimization is a powerful optical design program with the scope needed to meet todays optical design requirements. Intermediate optical design spie press monograph vol. Fastforward to today, we have complex lens systems that are hard to manufacture and test, in combination with the extremely fast computational powers that we have now, the calculations on software dominate the lens design process. If the object is a plane surface perpendicular to the axis of the optical system, the image of any point on the object must also lie in a plane perpendicular to the axis. Code v is the industryleading optical design software code v is used for the design, optimization, analysis, and tolerancing of imageforming optical systems and freespace photonic devices. Optical components, infrared materials, laser measurement, tunable, motion control and optomechanical components, laser crystals high purity materials, laser safety accessories, laser diode arrays modules, fiber optics components and accessories, infrared cameras and camera based profilers electrooptical detectorssensors, replacement co2 and ndyag optics, optical design software, laser beam. Design specialty lenses like high diopter lenses or lenses with high cylinders. The needs of microlithographic lenses are driving advances in lens design software, spherical and aspherical lens manufacturing, glass production, and lens metrology. Professional lens designers use optics packages such as zemax and code v, but these programs can cost thousands of.
Rotman lens design software rld synthesis, analysis. Milster graduated with a bs in electrical engineering at the university of missourirolla in 1981 and phd in optical sciences from the university of arizona in 1987. Snps, a world leader in software and ip used in the design, verification and manufacture of electronic components and systems, today announced the availability of enhancements to its code v optical design and analysis software, acquired as part of synopsys acquisition of optical research associates ora. The heart of any optical design software is its optimizer. Choosing the right optical design software is about more than just the software. Even current lenses, comprising more than 20 elements, can be understandable through the analysis.
Sep 28, 2011 fully integrated glass expert tool automatically finds the optimal set of glasses for a users lens design. Code v combines superior engineering capabilities with the control and access of an intuitive user interface. The evolution of the microlithographic lens is described based on an analysis of main features of the lenses in each generation. New shape specification eases design and fabrication of aspheres. International optical design conference camera in a can lens design contest was optimized using global synthesis. Modern lens design using a lens manufacturing database. Sophisticated software allows complex optical design. Code v software has contributed significantly to important technological advances across a wide spectrum of fields such as. Microlithographic reduction projection catadioptric objective. This video introduces optical design and optical aberrations. The design of lens 21 is shown in greater detail in fig. Smith reveals timetested methods for designing topquality lenses. You are here winlens optical design software free winlens basic.
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